<oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
  <dc:creator>Noeth, A.</dc:creator>
  <dc:creator>Yamada, T.</dc:creator>
  <dc:creator>Tagantsev, A. K.</dc:creator>
  <dc:creator>Setter, N.</dc:creator>
  <dc:date>2010</dc:date>
  <dc:identifier>https://sonar.ch/global/documents/282358</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:relation>info:eu-repo/semantics/altIdentifier/doi/10.1080/10584587.2010.488560</dc:relation>
  <dc:relation>info:eu-repo/semantics/altIdentifier/issn/1058-4587</dc:relation>
  <dc:source>Integrated Ferroelectrics. - Informa UK Limited. - 2010, vol. 115, no. 1, p. 110-119</dc:source>
  <dc:subject xmlns:ns0="xml" ns0:lang="en">Control and Systems Engineering</dc:subject>
  <dc:subject xmlns:ns1="xml" ns1:lang="en">Electrical and Electronic Engineering</dc:subject>
  <dc:subject xmlns:ns2="xml" ns2:lang="en">Materials Chemistry</dc:subject>
  <dc:subject xmlns:ns3="xml" ns3:lang="en">Electronic, Optical and Magnetic Materials</dc:subject>
  <dc:subject xmlns:ns4="xml" ns4:lang="en">Condensed Matter Physics</dc:subject>
  <dc:subject xmlns:ns5="xml" ns5:lang="en">Ceramics and Composites</dc:subject>
  <dc:title xmlns:ns6="xml" ns6:lang="en">Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon</dc:title>
  <dc:type>http://purl.org/coar/resource_type/c_6501</dc:type>
</oai_dc:dc>