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Compact Mid-Infrared Gas Sensing Enabled by an All-Metamaterial Design.

  • Lochbaum A Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  • Dorodnyy A Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  • Koch U Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  • Koepfli SM Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  • Volk S Materials and Device Engineering (MaDE) Group, ETH Zurich, 8092 Zurich, Switzerland.
  • Fedoryshyn Y Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  • Wood V Materials and Device Engineering (MaDE) Group, ETH Zurich, 8092 Zurich, Switzerland.
  • Leuthold J Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
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  • 2020-04-29
Published in:
  • Nano letters. - 2020
Optical gas sensing
electronic photonic cointegration
metamaterials
mid-infrared photonics
thermal emission engineering
English The miniaturization of mid-infrared optical gas sensors has great potential to make the "fingerprint region" between 2 and 10 μm accessible to a variety of cost-sensitive applications ranging from medical technology to atmospheric sensing. Here we demonstrate a gas sensor concept that achieves a 30-fold reduction in absorption volume compared to conventional gas sensors by using plasmonic metamaterials as on-chip optical filters. Integrating metamaterials into both the emitter and the detector cascades their individual filter functions, yielding a narrowband spectral response tailored to the absorption band of interest, here CO2. Simultaneously, the metamaterials' angle-independence is maintained, enabling an optically efficient, millimeter-scale cavity. With a CO2 sensitivity of 22.4 ± 0.5 ppm·Hz-0.5, the electrically driven prototype already performs at par with much larger commercial devices while consuming 80% less energy per measurement. The all-metamaterial sensing concept offers a path toward more compact and energy-efficient mid-infrared gas sensors without trade-offs in sensitivity or robustness.
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  • English
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hybrid
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https://sonar.ch/global/documents/112873
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