Which PZT thin films for piezoelectric microactuator applications?
Journal article

Which PZT thin films for piezoelectric microactuator applications?

  • Dubois, Marc-Alexandre a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
  • Muralt, Paul a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
  • Taylor, David V. a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
  • Hiboux, Stephane a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
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  • 2006-8-19
Published in:
  • Integrated Ferroelectrics. - Informa UK Limited. - 1998, vol. 22, no. 1-4, p. 535-543
Language
  • English
Open access status
closed
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Persistent URL
https://sonar.ch/global/documents/120882
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