Journal article
Which PZT thin films for piezoelectric microactuator applications?
-
Dubois, Marc-Alexandre
a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
-
Muralt, Paul
a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
-
Taylor, David V.
a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
-
Hiboux, Stephane
a Laboratoire de Céramique , Swiss Federal Institute of Technology , CH-1015 , Lausanne , Switzerland
Show more…
Published in:
- Integrated Ferroelectrics. - Informa UK Limited. - 1998, vol. 22, no. 1-4, p. 535-543
-
Language
-
-
Open access status
-
closed
-
Identifiers
-
-
Persistent URL
-
https://sonar.ch/global/documents/120882
Statistics
Document views: 41
File downloads: