Functionalization of Silica Nanoparticles and Native Silicon Oxide with Tailored Boron-Molecular Precursors for Efficient and Predictive p-Doping of Silicon
Journal article

Functionalization of Silica Nanoparticles and Native Silicon Oxide with Tailored Boron-Molecular Precursors for Efficient and Predictive p-Doping of Silicon

  • Mathey, Laurent C2P2, CPE Lyon, 43 Bd du 11 Nov. 1918, Villeurbanne 69616 Cedex, France
  • Alphazan, Thibault C2P2, CPE Lyon, 43 Bd du 11 Nov. 1918, Villeurbanne 69616 Cedex, France
  • Valla, Maxence Department of Chemistry and Applied Biosciences, ETH Zürich, Vladimir Prelog Weg. 1-5, CH-8093 Zürich, Switzerland
  • Veyre, Laurent C2P2, CPE Lyon, 43 Bd du 11 Nov. 1918, Villeurbanne 69616 Cedex, France
  • Fontaine, Hervé CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Enyedi, Virginie CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Yckache, Karim CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Danielou, Marianne CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Kerdiles, Sébastien CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Guerrero, Jean CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Barnes, Jean-Paul CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Veillerot, Marc CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Chevalier, Nicolas CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Mariolle, Denis CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Bertin, François CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Durand, Corentin Institut d’Electronique et de Microélectronique et de Nanotechnologies (IEMN), CNRS, UMR 8520, Département ISEN, 41 bd Vauban, Lille 59046 Cedex, France
  • Berthe, Maxime Institut d’Electronique et de Microélectronique et de Nanotechnologies (IEMN), CNRS, UMR 8520, Département ISEN, 41 bd Vauban, Lille 59046 Cedex, France
  • Dendooven, Jolien Department of Solid State Sciences, Ghent University, Krijgslaan 281−S1, B-9000 Gent, Belgium
  • Martin, François CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
  • Thieuleux, Chloé C2P2, CPE Lyon, 43 Bd du 11 Nov. 1918, Villeurbanne 69616 Cedex, France
  • Grandidier, Bruno Institut d’Electronique et de Microélectronique et de Nanotechnologies (IEMN), CNRS, UMR 8520, Département ISEN, 41 bd Vauban, Lille 59046 Cedex, France
  • Copéret, Christophe Department of Chemistry and Applied Biosciences, ETH Zürich, Vladimir Prelog Weg. 1-5, CH-8093 Zürich, Switzerland
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  • 2015-6-4
Published in:
  • The Journal of Physical Chemistry C. - American Chemical Society (ACS). - 2015, vol. 119, no. 24, p. 13750-13757
Language
  • English
Open access status
closed
Identifiers
Persistent URL
https://sonar.ch/global/documents/139961
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