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High-aspect-ratio nanoimprint process chains.

  • Cadarso VJ Laboratory for Micro- and Nanotechnology, Research Division Synchrotron Radiation and Nanotechnology, Paul Scherrer Institut, Villigen 5232, Switzerland.
  • Chidambaram N Laboratory for Micro- and Nanotechnology, Research Division Synchrotron Radiation and Nanotechnology, Paul Scherrer Institut, Villigen 5232, Switzerland.
  • Jacot-Descombes L Micro Resist Technology GmbH, Köpenicker Straße 325, Berlin 12555, Germany.
  • Schift H Laboratory for Micro- and Nanotechnology, Research Division Synchrotron Radiation and Nanotechnology, Paul Scherrer Institut, Villigen 5232, Switzerland.
  • 2019-05-07
Published in:
  • Microsystems & nanoengineering. - 2017
2-photon polymerization
Ormocer
cryo-etching
direct 6 write laser lithography
high aspect ratio
moulding
nanoimprint lithography
photonic nanofences
English Different methods capable of developing complex structures and building elements with high-aspect-ratio nanostructures combined with microstructures, which are of interest in nanophotonics, are presented. As originals for subsequent replication steps, two families of masters were developed: (i) 3.2 μm deep, 180 nm wide trenches were fabricated by silicon cryo-etching and (ii) 9.8 μm high, 350 nm wide ridges were fabricated using 2-photon polymerization direct laser writing. Both emerging technologies enable the vertical smooth sidewalls needed for a successful imprint into thin layers of polymers with aspect ratios exceeding 15. Nanoridges with high aspect ratios of up to 28 and no residual layer were produced in Ormocers using the micromoulding into capillaries (MIMIC) process with subsequent ultraviolet-curing. This work presents and balances the different fabrication routes and the subsequent generation of working tools from masters with inverted tones and the combination of hard and soft materials. This provides these techniques with a proof of concept for their compatibility with high volume manufacturing of complex micro- and nanostructures.
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  • English
Open access status
gold
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https://sonar.ch/global/documents/159524
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