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Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings.
Journal article

Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings.

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  • 2006-04-13
Published in:
  • Nano letters. - 2006
Arsenicals
Computer Simulation
Computer-Aided Design
Crystallization
Elasticity
Equipment Design
Equipment Failure Analysis
Gallium
Indium
Materials Testing
Models, Chemical
Molecular Conformation
Nanostructures
Nanotechnology
Particle Size
Stress, Mechanical
English This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures. The process is based on conventional microfabrication techniques to create a planar pattern in an InGaAs/GaAs bilayer that self-assembles into 3D structures during a wet etch release. The nanostructures are proposed to function as nanosprings for electromechanical sensors. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical characterization. The results were validated by simulation.
Language
  • English
Open access status
closed
Identifiers
Persistent URL
https://sonar.ch/global/documents/185224
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