Journal article

Gas-assisted silver deposition with a focused electron beam.

  • Berger L Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
  • Madajska K Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland.
  • Szymanska IB Department of Chemistry, Nicolaus Copernicus University, Gagarina 7, 87 100 Toruń, Poland.
  • Höflich K Nanoscale Structures and Microscopic Analysis, Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany.
  • Polyakov MN Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
  • Jurczyk J Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
  • Guerra-Nuñez C Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
  • Utke I Empa - Swiss Federal Laboratories for Materials Science and Technology Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
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  • 2018-02-15
Published in:
  • Beilstein journal of nanotechnology. - 2018
English Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be identified. Well known for its plasmonic properties, silver represents an interesting candidate for FEBID. For this purpose the carboxylate complex silver(I) pentafluoropropionate (AgO2CC2F5) was used for the first time in FEBID and resulted in deposits with high silver content of up to 76 atom %. As verified by TEM investigations, the deposited material is composed of pure silver crystallites in a carbon matrix. It showed good electrical properties and a strong Raman signal enhancement. Interestingly, silver crystal growth presents a strong dependency on electron dose and precursor refreshment.
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