Effect of AlN seed layer on crystallographic characterization of piezoelectric AlN
- Howell, Kaitlin M. ORCID Advanced NEMS Group, EPFL, Station 9, Bâtiment MED, 1015 Lausanne, Switzerland
- Bashir, Waqas Advanced NEMS Group, EPFL, Station 9, Bâtiment MED, 1015 Lausanne, Switzerland
- De Pastina, Annalisa Advanced NEMS Group, EPFL, Station 9, Bâtiment MED, 1015 Lausanne, Switzerland
- Matloub, Ramin Electroceramic Thin Films Group, EPFL, SCI-STI-PM, Station 12, Bâtiment MXD, 1015 Lausanne, Switzerland
- Muralt, Paul Electroceramic Thin Films Group, EPFL, SCI-STI-PM, Station 12, Bâtiment MXD, 1015 Lausanne, Switzerland
- Villanueva, Luis G. Advanced NEMS Group, EPFL, Station 9, Bâtiment MED, 1015 Lausanne, Switzerland
Published in:
- Journal of Vacuum Science & Technology A. - American Vacuum Society. - 2019, vol. 37, no. 2, p. 021504
- Language
-
- English
- Open access status
- green
- Identifiers
-
- DOI 10.1116/1.5082888
- ISSN 0734-2101
- Persistent URL
- https://sonar.ch/global/documents/20848
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