Sub-ppm detection of vapors using piezoresistive microcantilever array sensors.
Journal article

Sub-ppm detection of vapors using piezoresistive microcantilever array sensors.

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  • 2009-05-07
Published in:
  • Nanotechnology. - 2009
English The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual alkanes in a homologous series as well as common volatile organic compounds according to principal component analysis. We developed a new method to evaluate the sensitivity, taking advantage of the low vapor pressures of alkanes with longer chains, such as n-dodecane, n-tridecane and n-tetradecane, under saturated vapor conditions. This method reveals sub-ppm sensitivity and the cantilever response is found to follow the mass of evaporated analytes as calculated using a quantitative model based on the Langmuir evaporation model.
Language
  • English
Open access status
closed
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Persistent URL
https://sonar.ch/global/documents/224437
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