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Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review.

  • Plank H Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria.
  • Winkler R Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes (DEFINE), Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, Austria.
  • Schwalb CH GETec Microscopy GmbH, 1220 Vienna, Austria.
  • Hütner J GETec Microscopy GmbH, 1220 Vienna, Austria.
  • Fowlkes JD Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
  • Rack PD Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
  • Utke I Mechanics of Materials and Nanostructures Laboratory, Empa-Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland.
  • Huth M Physics Institute, Goethe University Frankfurt, 60323 Frankfurt am Main, Germany.
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  • 2020-01-08
Published in:
  • Micromachines. - 2019
3D printing
additive manufacturing
atomic force microscopy
focused electron beam-induced deposition
nano-fabrication
nano-printing
scanning probe microscopy
tip fabrication
English Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication / modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
Language
  • English
Open access status
gold
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Persistent URL
https://sonar.ch/global/documents/248603
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