CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
- Nirschl, Martin
- Rantala, Arto
- Tukkiniemi, Kari
- Auer, Sanna
- Hellgren, Ann-Charlotte
- Pitzer, Dana
- Schreiter, Matthias
- Vikholm-Lundin, Inger
- 2010-4-27
Published in:
- Sensors. - MDPI AG. - 2010, vol. 10, no. 5, p. 4180-4193
- Language
-
- English
- Open access status
- gold
- Identifiers
-
- DOI 10.3390/s100504180
- ISSN 1424-8220
- Persistent URL
- https://sonar.ch/global/documents/292654
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