Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching.
- Romano L Institute for Biomedical Engineering, University and ETH Zürich, CH-8092 Zürich, Switzerland.
- 2020-11-04
Published in:
- Micromachines. - 2020
English
Discovered by Li and Bohn in 2000 [1], Metal Assisted Chemical Etching has been finally recognized as an emerging etching technology.[...].
- Language
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- English
- Open access status
- gold
- Identifiers
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- DOI 10.3390/mi11110988
- PMID 33142913
- Persistent URL
- https://sonar.ch/global/documents/3234
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