Journal article
High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating
- Romano, Lucia ORCID Department of Physics and CNR-IMM University of Catania 64 via S. Sofia 95123 Catania Italy
- Vila-Comamala, Joan Institute for Biomedical Engineering University and ETH Zürich 8092 Zürich Switzerland
- Jefimovs, Konstantins Institute for Biomedical Engineering University and ETH Zürich 8092 Zürich Switzerland
- Stampanoni, Marco Institute for Biomedical Engineering University and ETH Zürich 8092 Zürich Switzerland
- 2020-6-17
Published in:
- Advanced Engineering Materials. - Wiley. - 2020, vol. 22, no. 10, p. 2000258
- Language
-
- English
- Open access status
- closed
- Identifiers
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- DOI 10.1002/adem.202000258
- ISSN 1438-1656
- Persistent URL
- https://sonar.ch/global/documents/67011
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