Journal article
Surface Reaction Kinetics of Titanium Isopropoxide and Water in Atomic Layer Deposition
- Reinke, Michael Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne, Station 17, CH-1015 Lausanne, Switzerland
- Kuzminykh, Yury Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne, Station 17, CH-1015 Lausanne, Switzerland
- Hoffmann, Patrik Laboratory for Photonic Materials and Characterization, Ecole Polytechnique Fédérale de Lausanne, Station 17, CH-1015 Lausanne, Switzerland
- 2016-2-24
Published in:
- The Journal of Physical Chemistry C. - American Chemical Society (ACS). - 2016, vol. 120, no. 8, p. 4337-4344
General Energy
Physical and Theoretical Chemistry
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
- Language
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- English
- Open access status
- closed
- Identifiers
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- DOI 10.1021/acs.jpcc.5b10529
- ISSN 1932-7447
- Persistent URL
- https://sonar.ch/global/documents/80215
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