How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses
- Kirchner, Robert Paul Scherrer Institut (Switzerland)
- Chidambaram, Nachiappan Paul Scherrer Institut (Switzerland)
- Altana, Mirco Heptagon Oy (Switzerland)
- Schift, Helmut Paul Scherrer Institut (Switzerland)
Published in:
- Laser 3D Manufacturing IV. - SPIE. - 2017
- Language
-
- English
- Open access status
- green
- Identifiers
- Persistent URL
- https://sonar.ch/global/documents/93163
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