Influence of the burst mode onto the specific removal rate for metals and           semiconductors
Journal article

Influence of the burst mode onto the specific removal rate for metals and semiconductors

  • Neuenschwander, Beat Institute for Applied Laser, Photonics and Surface technologies ALPS, Bern University of Applied Sciences, Pestalozzistrasse 20, 3400 Burgdorf, Switzerland
  • Jaeggi, Beat LASEA Switzerland SA, Rue du Soleil 11, 2504 Biel/Bienne, Switzerland
  • Foerster, Daniel J. Institut für Strahlwerkzeuge, University of Stuttgart, Pfaffenwaldring 43, 70569 Stuttgart, Germany
  • Kramer, Thorsten Institute for Applied Laser, Photonics and Surface technologies ALPS, Bern University of Applied Sciences, Pestalozzistrasse 20, 3400 Burgdorf, Switzerland
  • Remund, Stefan Institute for Applied Laser, Photonics and Surface technologies ALPS, Bern University of Applied Sciences, Pestalozzistrasse 20, 3400 Burgdorf, Switzerland
Published in:
  • Journal of Laser Applications. - Laser Institute of America. - 2019, vol. 31, no. 2, p. 022203
Language
  • English
Open access status
closed
Identifiers
Persistent URL
https://sonar.ch/global/documents/139850
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