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Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Noeth, A.
a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
Yamada, T.
a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
Tagantsev, A. K.
a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
Setter, N.
a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
2010-12
Published in:
Integrated Ferroelectrics. - Informa UK Limited. - 2010, vol. 115, no. 1, p. 110-119
Control and Systems Engineering
Electrical and Electronic Engineering
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Ceramics and Composites
Language
English
Open access status
closed
Identifiers
DOI
10.1080/10584587.2010.488560
ISSN
1058-4587
Persistent URL
https://sonar.ch/global/documents/282358
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