Journal article
Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
- Noeth, A. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
- Yamada, T. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
- Tagantsev, A. K. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
- Setter, N. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
- 2010-12
Published in:
- Integrated Ferroelectrics. - Informa UK Limited. - 2010, vol. 115, no. 1, p. 110-119
Control and Systems Engineering
Electrical and Electronic Engineering
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Ceramics and Composites
- Language
-
- English
- Open access status
- closed
- Identifiers
-
- DOI 10.1080/10584587.2010.488560
- ISSN 1058-4587
- Persistent URL
- https://sonar.ch/global/documents/282358
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