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Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Journal article

Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon

  • Noeth, A. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
  • Yamada, T. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
  • Tagantsev, A. K. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
  • Setter, N. a Ceramics Laboratory , EPFL Swiss Federal Institute of Technology , 1015, Lausanne, Switzerland
  • 2010-12
Published in:
  • Integrated Ferroelectrics. - Informa UK Limited. - 2010, vol. 115, no. 1, p. 110-119
Control and Systems Engineering
Electrical and Electronic Engineering
Materials Chemistry
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Ceramics and Composites
Language
  • English
Open access status
closed
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https://sonar.ch/global/documents/282358
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